Magnesium Fluoride(MgF₂) Crystal
Shape:
Windows, Lens, Prisms etc
Flatness:
≤λ/8@633nm
Bevel:
<0.2mmx45°
Surface quality:
60/40~40/20
Parallelism:
≤3′
| wdt_ID | Attributes | Values |
|---|---|---|
| 1 | Density | 3.18 g/cm³ |
| 2 | Melting Point | 1255℃ |
| 3 | Thermal Conductivity | 0.3 Wm-1K-1 at 300K |
| 4 | Thermal Expansion | 13.7 x 10⁻⁶ /℃ parallel c-axis 8.9 x 10⁻⁶ /℃ perpendicular c-axis |
| 6 | Knoop Hardness | 415 with 100g indenter (kg/mm²) |
| 7 | Specific Heat Capacity | 1003 J/(kg.k) |
| 8 | Dielectric Constant | 1.87 at 1MHz parallel c-axis 1.45 at 1MHz perpendicular c-axis |
| 10 | Youngs Modulus (E) | 138.5 GPa |
| 11 | Shear Modulus (G) | 54.66 GPa |
| 12 | Bulk Modulus (K) | 101.32 GPa |
| 13 | Elastic Coefficient | C11=164; C12=53; C44=33.7 C13=63; C66=96 |
| 15 | Apparent Elastic Limit | 49.6 MPa (7200 psi) |
| 16 | Poisson Ratio | 0.276 |
wdt_ID Attributes Values
15
Transmission Range
110 nm to 7.5 μm
16
Transmittance
>90% at 193 nm to 6 μm
17
Refractive Index
No=1.37608; Ne=1.38771 (at 0.7μm)
18
Reflection Loss
5.2% at 0.6 μm (both surfaces)
19
Residual Radiation Peak
20 nm
20
Absorption Coefficient
0.04 cm⁻¹ at 2.7 μm
21
dn/dT
2.3 x 10⁻⁶ /℃ parallel c-axis
1.7 x 10⁻⁶ /℃ perpendicular c-axis
| wdt_ID | Attributes | Values |
|---|---|---|
| 15 | Transmission Range | 110 nm to 7.5 μm |
| 16 | Transmittance | >90% at 193 nm to 6 μm |
| 17 | Refractive Index | No=1.37608; Ne=1.38771 (at 0.7μm) |
| 18 | Reflection Loss | 5.2% at 0.6 μm (both surfaces) |
| 19 | Residual Radiation Peak | 20 nm |
| 20 | Absorption Coefficient | 0.04 cm⁻¹ at 2.7 μm |
| 21 | dn/dT | 2.3 x 10⁻⁶ /℃ parallel c-axis 1.7 x 10⁻⁶ /℃ perpendicular c-axis |
| wdt_ID | Attributes | Values |
|---|---|---|
| 15 | Solubility | 0.0002 g/ 100g water at 20℃ |
| 16 | Molecular Weight | 62.32 |
| 23 | Structure | Tetragonal Crystal |
| 24 | Cleavage Plane | (110) |
Magnesium Fluoride crystal is used as a lens, prism and window for wavelength from 110nm to 7.5μm. It is a most suitable material as window for ArF Excimer Laser, for the reason of its good transmission at 193nm.
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