{"id":11130,"date":"2022-11-19T02:37:51","date_gmt":"2022-11-19T02:37:51","guid":{"rendered":"https:\/\/www.szlaser.com\/?page_id=11130"},"modified":"2022-11-19T05:36:18","modified_gmt":"2022-11-19T05:36:18","slug":"off-axis-parabolic-mirror","status":"publish","type":"page","link":"https:\/\/www.szlaser.com\/index.php\/wiki\/off-axis-parabolic-mirror\/","title":{"rendered":"Manufacture of an aluminum alloy off-axis parabolic mirror"},"content":{"rendered":"<div class=\"fusion-fullwidth fullwidth-box fusion-builder-row-1 fusion-flex-container has-pattern-background has-mask-background nonhundred-percent-fullwidth non-hundred-percent-height-scrolling\" style=\"--awb-border-radius-top-left:0px;--awb-border-radius-top-right:0px;--awb-border-radius-bottom-right:0px;--awb-border-radius-bottom-left:0px;--awb-flex-wrap:wrap;\" ><div class=\"fusion-builder-row fusion-row fusion-flex-align-items-flex-start fusion-flex-content-wrap\" style=\"max-width:1331.2px;margin-left: calc(-4% \/ 2 );margin-right: calc(-4% \/ 2 );\"><div class=\"fusion-layout-column fusion_builder_column fusion-builder-column-0 fusion_builder_column_1_1 1_1 fusion-flex-column\" style=\"--awb-bg-size:cover;--awb-width-large:100%;--awb-margin-top-large:0px;--awb-spacing-right-large:1.92%;--awb-margin-bottom-large:20px;--awb-spacing-left-large:1.92%;--awb-width-medium:100%;--awb-order-medium:0;--awb-spacing-right-medium:1.92%;--awb-spacing-left-medium:1.92%;--awb-width-small:100%;--awb-order-small:0;--awb-spacing-right-small:1.92%;--awb-spacing-left-small:1.92%;\"><div class=\"fusion-column-wrapper fusion-column-has-shadow fusion-flex-justify-content-flex-start fusion-content-layout-column\"><div class=\"fusion-title title fusion-title-1 fusion-sep-none fusion-title-text fusion-title-size-one\"><h1 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:32;line-height:1.3;\"><h1>Manufacture of an aluminum alloy off-axis parabolic mirror<\/h1><\/h1><\/div><div class=\"fusion-text fusion-text-1\"><p>off-axis paraboloid, slow-tool servo turning method, aberration-free method<\/p>\n<\/div><div class=\"fusion-title title fusion-title-2 fusion-sep-none fusion-title-text fusion-title-size-three\"><h3 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:24;line-height:1.3;\"><h3>Summary<\/h3><\/h3><\/div><div class=\"fusion-text fusion-text-2\"><p>Aluminum alloy off-axis parabolic mirrors have been used more and more in optoelectronic equipment due to their ease of processing, economy, and suitability for use in low temperature and variable temperature environments. In this paper, by using the single-point diamond turning process, the main parameters affecting the surface shape machining accuracy in slow-tool servo turning and the aberration-free measurement plan for the surface shape are studied. An economical and reliable process method, the results show that the surface shape of the aluminum alloy off-axis parabolic mirror with a diameter of 120mm can reach 1\/3\u03bb RMS by the slow-tool servo turning method, and the process is stable and meets the needs of use.<\/p>\n<\/div><div class=\"fusion-title title fusion-title-3 fusion-sep-none fusion-title-text fusion-title-size-three\"><h3 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:24;line-height:1.3;\"><h3>0 Introduction<\/h3><\/h3><\/div><div class=\"fusion-text fusion-text-3\"><p>Aspheric optical parts have become very important optical parts because of their excellent optical properties, and are widely used in aerospace, military, commercial and other fields. In recent years, off-axis aspheric mirrors have been used more and more in optoelectronic equipment due to their unique structural advantages, and off-axis parabolic mirrors are one of the most typical ones.<\/p>\n<p>The processing of aluminum alloy aspherical mirrors can be formed by existing processes such as turning, milling, and grinding, and processed into aspherical mirrors by diamond single-point turning technology, which is more economical and efficient than glass aspherical mirrors. At the same time, the expansion coefficient of the aluminum alloy mirror and the metal material of the mounting support structure is relatively close, which reduces the influence of the mismatch of the expansion coefficient, avoids the thermal stress and strain caused by the inconsistent expansion coefficient of the optical-mechanical system material, and is beneficial to the mirror surface shape and long-term maintenance of optical system parameters, especially suitable for optical systems working in low temperature and variable temperature environments. This paper introduces a processing method of an off-axis parabolic mirror based on the off-axis parabolic mirror used in a multi-optical axis calibration instrument of a product of the company.<\/p>\n<\/div><div class=\"fusion-title title fusion-title-4 fusion-sep-none fusion-title-text fusion-title-size-three\"><h3 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:24;line-height:1.3;\"><h3>1 Processing of off-axis parabolic mirrors<\/h3><\/h3><\/div><div class=\"fusion-text fusion-text-4\"><p>The diameter of the off-axis parabolic mirror is 120mm, the off-axis amount is 150\u00b11mm, the vertex curvature is R2000\u00b12mm, and the material is AL6061-T6 aluminum alloy.<\/p>\n<\/div><div class=\"fusion-title title fusion-title-5 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>1.1 Processing method of off-axis parabolic mirror<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-5\"><p>The turning methods of off-axis parabolic mirrors usually include coaxial turning and slow-tool servo turning. The coaxial turning method is to make the axis of the paraboloid coaxial with the rotation center of the main shaft, cut it in a conventional rotationally symmetric way, and then remove the required off-axis part. Its advantages are high surface accuracy, good surface roughness and simple machining procedures , the disadvantage is that it cannot be processed by machine tools with large off-axis and large diameter aspheric mirrors.<\/p>\n<p>The slow-tool servo turning method is to make the geometric center of the off-axis parabolic mirror coaxial with the spindle rotation center, and use the slow-tool servo method for turning, which is almost the opposite of the coaxial turning method. Limited by the X-axis travel of the company&#8217;s existing single-point diamond lathe, the machine tool cannot use the coaxial turning method, so the slow-tool servo turning method is used for processing. The schematic and processing of the slow-tool servo turning method are shown in Figure 1 and Figure 2.<\/p>\n<p><div id=\"attachment_11148\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11148\" class=\"lazyload size-fusion-600 wp-image-11148\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-600x412.jpg\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-600x412.jpg\" alt=\"\" width=\"600\" height=\"412\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27412%27%20viewBox%3D%270%200%20600%20412%27%3E%3Crect%20width%3D%27600%27%20height%3D%27412%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-200x137.jpg 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-300x206.jpg 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-400x275.jpg 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-600x412.jpg 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-768x528.jpg 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method-800x550.jpg 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.1-Schematic-diagram-of-slow-tool-servo-turning-method.jpg 918w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11148\" class=\"wp-caption-text\">Fig.1 Schematic diagram of slow tool servo turning method<\/p><\/div>\n<div id=\"attachment_11133\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11133\" class=\"lazyload size-fusion-600 wp-image-11133\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-600x415.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-600x415.png\" alt=\"\" width=\"600\" height=\"415\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27415%27%20viewBox%3D%270%200%20600%20415%27%3E%3Crect%20width%3D%27600%27%20height%3D%27415%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-200x138.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-300x207.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-400x277.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-600x415.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-768x531.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram-800x553.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-2-Cutting-diagram.png 950w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11133\" class=\"wp-caption-text\">Figure 2 Cutting diagram<\/p><\/div><\/p>\n<\/div><div class=\"fusion-title title fusion-title-6 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>1.2 Processing flow<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-6\"><p><strong>\u2460Tool preparation. <\/strong><\/p>\n<p>Make a special jig (as shown in Figure 3), the jig includes screw holes connected with the main shaft of the equipment, a vacuum air path and a positioning pin for positioning the workpiece;<\/p>\n<div id=\"attachment_11134\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11134\" class=\"lazyload size-fusion-600 wp-image-11134\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig-600x567.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig-600x567.png\" alt=\"\" width=\"600\" height=\"567\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27567%27%20viewBox%3D%270%200%20600%20567%27%3E%3Crect%20width%3D%27600%27%20height%3D%27567%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig-200x189.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig-300x283.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig-400x378.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig-600x567.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-3-Special-jig.png 704w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11134\" class=\"wp-caption-text\">Figure 3 Special jig<\/p><\/div>\n<p>Make the inclined plane tool setting (as shown in Figure 4) and the workpiece blank;<\/p>\n<div id=\"attachment_11135\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11135\" class=\"lazyload wp-image-11135 size-fusion-600\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting-600x538.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting-600x538.png\" alt=\"\" width=\"600\" height=\"538\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27538%27%20viewBox%3D%270%200%20600%20538%27%3E%3Crect%20width%3D%27600%27%20height%3D%27538%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting-200x179.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting-300x269.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting-400x359.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting-600x538.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-4-Inclined-plane-tool-setting.png 748w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11135\" class=\"wp-caption-text\">Figure 4 Inclined plane tool setting<\/p><\/div>\n<p>To prepare the cutting tool, this article selects the natural diamond tool from Contour Tools, UK. The rake angle of the tool is 0\u00b0, the relief angle is -10\u00b0, the edge radius is 0.75mm, the waviness cone control is less than 0.25um, and the model is C0.75mLGC\/0.25 um.<\/p>\n<p><strong>\u2461 parts clamping<\/strong><\/p>\n<p>Remove the C-axis vacuum suction cup and coolant cover of the single-point lathe, install the special jig on the C-axis with half-tight screws, and use a lever dial indicator and a small mallet to adjust the circular runout of the jig, adjust it to \u2264 1um, and then lock and fix it ; Install the turning tool at the T1 position, and use the optical tool setter to measure the cutting edge radius and absolute coordinate position of the tool, and save them to the UPX system.<\/p>\n<p><strong>\u2462 Activate the C axis<\/strong><\/p>\n<p>Input command: M27.1, activate the C axis, turn the ROTARY button on the console panel to &#8220;C&#8221;; input command G92 to clear the compensation; level the fixture positioning platform along the X direction, B+ and B- control the C axis rotation, use The lever dial gauge measures the parallel inclination of the positioning platform along the X direction is better than 2um, and then in the tool menu of the UPX system T1, the C axis &#8220;Load Current Position&#8221; in the T2 tool or directly input the command: G92C0.<\/p>\n<p><strong>\u2463 Tool alignment<\/strong><\/p>\n<p>Turn the ROTARY knob to &#8220;B&#8221;, use the OFHC oxygen-free copper baseball to face the tool for tool setting, adjust the tool offset in the Y and X directions to be accurate, it is required that the cylindrical or conical convex hull can hardly be seen under the 100X tool microscope, use The PGI profiler of Taylor Hobson Company detects the Delta X \u2264 1um of the surface; \u2464 Fine-tune the tool. Turn the ROTARY knob to &#8220;C&#8221;, install the inclined plane workpiece, perform precise tool setting by using the digital laser wavefront interferometer, write the inclined plane turning program in Diffsys, and measure the inclined plane shape through the part in the interferogram after turning. The X Profile and Y Profile values are used to fine tune the tool offset.<\/p>\n<p><strong>\u2465 Turning<\/strong><\/p>\n<p>After the tool offset is adjusted, write the part processing program in Diffsys, install the part, and carry out cutting processing. The X Increment in the rough cutting parameters is set to 0.05mm, the feed is 0.02 ~ 0.04mm, and the X Increment in the finishing cutting parameters is set to 0.01mm , the feed is 0.002 ~ 0.004mm.<\/p>\n<\/div><div class=\"fusion-title title fusion-title-7 fusion-sep-none fusion-title-text fusion-title-size-three\"><h3 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:24;line-height:1.3;\"><h3>2 Measurement of off-axis parabolic mirrors<\/h3><\/h3><\/div><div class=\"fusion-text fusion-text-7\"><p>Generally, the measurement of optical aspheric surfaces adopts special measuring instruments, and special software needs to be configured for off-axis aspheric surfaces, which is not only expensive, but also has many limitations. For the special off-axis aspheric surface such as the off-axis paraboloid, the detection method based on spherical interferometer can be used.<\/p>\n<\/div><div class=\"fusion-title title fusion-title-8 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>2.1 Measurement method &#8212; build an off-axis paraboloid measurement platform<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-8\"><p>In this paper, the WYKO RT6100 laser wavefront interferometer is used to build the following detection optical path. It mainly uses a pair of aberration-free conjugate points on the secondary aspheric surface, and introduces auxiliary optical elements into the detection optical path to form a self-collimating optical path for detection. The spherical reentry mirror is adjusted so that the focus of the off-axis parabolic mirror is conjugated with the center of the sphere. The schematic diagram of the detection optical path is shown in Figure 5.<\/p>\n<div id=\"attachment_11150\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11150\" class=\"lazyload size-fusion-600 wp-image-11150\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-600x164.jpg\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-600x164.jpg\" alt=\"\" width=\"600\" height=\"164\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27164%27%20viewBox%3D%270%200%20600%20164%27%3E%3Crect%20width%3D%27600%27%20height%3D%27164%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-200x55.jpg 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-300x82.jpg 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-400x109.jpg 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-600x164.jpg 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-768x210.jpg 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-800x219.jpg 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-1024x280.jpg 1024w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path-1200x328.jpg 1200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Figure-5-Detection-optical-path.jpg 1420w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11150\" class=\"wp-caption-text\">Fig. 5 Detection optical path<\/p><\/div>\n<\/div><div class=\"fusion-title title fusion-title-9 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>2.2 Clamping influence analysis and its optimization scheme<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-9\"><p>The optical system simulation of the measurement platform was carried out using Zemax software, and the following wavefront analysis was obtained. It can be seen from Figure 6, Figure 7, and Figure 8 that the adjustment accuracy of the interference optical cavity has a significant impact on the detection results. When installing the parts, it is necessary to level the off-axis parabolic mirror on the sagittal plane and the meridional plane as much as possible to avoid the image caused by this. Astigmatism, field curvature, coma and other measurement errors, and at the same time use the five-dimensional adjustment frame to adjust the position of the spherical return mirror to obtain the minimum value of the interference wavefront, so as to accurately reflect the surface shape error of the part itself.<\/p>\n<p><div id=\"attachment_11136\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11136\" class=\"lazyload size-fusion-600 wp-image-11136\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-600x452.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-600x452.png\" alt=\"\" width=\"600\" height=\"452\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27452%27%20viewBox%3D%270%200%20600%20452%27%3E%3Crect%20width%3D%27600%27%20height%3D%27452%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-200x151.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-300x226.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-400x302.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-600x452.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-768x579.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0-800x603.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.6-Sagittal-plane-Tilt-0.3\u00b0.png 805w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11136\" class=\"wp-caption-text\">Fig.6 Sagittal plane Tilt 0.3\u00b0<\/p><\/div>\n<div id=\"attachment_11137\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11137\" class=\"lazyload size-fusion-600 wp-image-11137\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-600x454.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-600x454.png\" alt=\"\" width=\"600\" height=\"454\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27454%27%20viewBox%3D%270%200%20600%20454%27%3E%3Crect%20width%3D%27600%27%20height%3D%27454%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-200x151.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-300x227.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-400x303.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-600x454.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane-768x581.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.7-Tilt-0.3\u00b0-on-the-meridian-plane.png 781w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11137\" class=\"wp-caption-text\">Fig.7 Tilt 0.3\u00b0 on the meridian plane<\/p><\/div>\n<div id=\"attachment_11138\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11138\" class=\"lazyload size-fusion-600 wp-image-11138\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-600x456.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-600x456.png\" alt=\"\" width=\"600\" height=\"456\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27456%27%20viewBox%3D%270%200%20600%20456%27%3E%3Crect%20width%3D%27600%27%20height%3D%27456%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-200x152.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-300x228.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-400x304.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-600x456.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-768x584.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes-800x608.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.8-Tilt0.3\u00b0-on-both-sagittal-and-meridional-planes.png 898w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11138\" class=\"wp-caption-text\">Fig.8 Tilt0.3\u00b0 on both sagittal and meridional planes<\/p><\/div><\/p>\n<p>Design a measuring tool (see Figure 9), remove the original three-claw structure, and install it on the five-dimensional adjustment frame of the horizontal laser wavefront interferometer. First, use a mirror with good parallelism and flatness to align the workpiece positioning surface with the interferometer. The optical path is adjusted and aligned, and then the workpiece is installed on the measuring tool through the positioning pin, and the position of the workpiece and the spherical return mirror is fine-tuned, and the change of the interference fringes is observed to minimize the astigmatism, so as to obtain a good interference cavity.<\/p>\n<p>Fig. 9 Special tooling for measuring and clamping<\/p>\n<div id=\"attachment_11151\" style=\"width: 810px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11151\" class=\"lazyload wp-image-11151 size-fusion-800\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-800x290.jpg\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-800x290.jpg\" alt=\"\" width=\"800\" height=\"290\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27800%27%20height%3D%27290%27%20viewBox%3D%270%200%20800%20290%27%3E%3Crect%20width%3D%27800%27%20height%3D%27290%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-200x72.jpg 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-300x109.jpg 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-400x145.jpg 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-600x217.jpg 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-768x278.jpg 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-800x290.jpg 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-1024x371.jpg 1024w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-1200x435.jpg 1200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping-1536x557.jpg 1536w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-9-Special-tooling-for-measuring-and-clamping.jpg 1650w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 800px) 100vw, 800px\" \/><p id=\"caption-attachment-11151\" class=\"wp-caption-text\">Fig. 9 Special tooling for measuring and clamping<\/p><\/div>\n<\/div><div class=\"fusion-title title fusion-title-10 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>2.3 Verification of the accuracy of the detection method used in this paper<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-10\"><p>Use the Luphoscan420 non-contact aspheric measuring system to perform absolute surface measurement, and obtain PV=2.063um in the workpiece aperture (see Figure 10). The measuring platform used in this paper measures PV=2.136um (see Figure 11). Therefore, the The measurement method is accurate and reliable.<\/p>\n<p><div id=\"attachment_11139\" style=\"width: 444px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11139\" class=\"lazyload size-full wp-image-11139\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-10-Luphoscan420-measurements.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-10-Luphoscan420-measurements.png\" alt=\"\" width=\"434\" height=\"574\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27434%27%20height%3D%27574%27%20viewBox%3D%270%200%20434%20574%27%3E%3Crect%20width%3D%27434%27%20height%3D%27574%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-10-Luphoscan420-measurements-200x265.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-10-Luphoscan420-measurements-227x300.png 227w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-10-Luphoscan420-measurements-400x529.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-10-Luphoscan420-measurements.png 434w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 434px) 100vw, 434px\" \/><p id=\"caption-attachment-11139\" class=\"wp-caption-text\">Fig. 10 Luphoscan420 measurements<\/p><\/div>\n<div id=\"attachment_11140\" style=\"width: 406px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11140\" class=\"lazyload size-full wp-image-11140\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-11-The-measured-values-of-the-interferometric-platform-in-this-paper.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-11-The-measured-values-of-the-interferometric-platform-in-this-paper.png\" alt=\"\" width=\"396\" height=\"719\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27396%27%20height%3D%27719%27%20viewBox%3D%270%200%20396%20719%27%3E%3Crect%20width%3D%27396%27%20height%3D%27719%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-11-The-measured-values-of-the-interferometric-platform-in-this-paper-165x300.png 165w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-11-The-measured-values-of-the-interferometric-platform-in-this-paper-200x363.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-11-The-measured-values-of-the-interferometric-platform-in-this-paper.png 396w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 396px) 100vw, 396px\" \/><p id=\"caption-attachment-11140\" class=\"wp-caption-text\">Fig. 11 The measured values of the interferometric platform in this paper<\/p><\/div><\/p>\n<\/div><div class=\"fusion-title title fusion-title-11 fusion-sep-none fusion-title-text fusion-title-size-three\"><h3 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:24;line-height:1.3;\"><h3>3 Process optimization and result analysis<\/h3><\/h3><\/div><div class=\"fusion-title title fusion-title-12 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>3.1 Process optimization of slow-tool servo turning method<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-11\"><p>In slow-tool servo turning, the tool centering error has a great influence on the machined surface. Generally speaking, the three angles of the tool attitude are guaranteed by the installation, and the error has little influence on the machining surface shape. The Z-axis direction is the direction of the depth of cut, which has no effect on the shape of the machined surface. The centering error of tool height and level is the most important factor. In this paper, the slow-tool servo cutting of the tool with inclined plane and the laser wavefront interferometer are used to adjust the tool offset more accurately. The XProfile and Y Profile curves obtained by measuring the tool on the inclined plane under the interferometer are symmetrical, and there is no center error, so the tool offset can be accurately adjusted. Figure 12 and Figure 13 show the interference diagram of the inclined plane with the tool after the ideal centering of the tool, and the surface shape of the workpiece after further optimization is shown in Figure 14 and Figure 15.<\/p>\n<p><div id=\"attachment_11141\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11141\" class=\"lazyload size-fusion-600 wp-image-11141\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-600x427.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-600x427.png\" alt=\"\" width=\"600\" height=\"427\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27427%27%20viewBox%3D%270%200%20600%20427%27%3E%3Crect%20width%3D%27600%27%20height%3D%27427%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-200x142.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-300x214.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-400x285.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-600x427.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-768x546.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool-800x569.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-12-Interference-diagram-of-the-inclined-plane-on-the-tool.png 863w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11141\" class=\"wp-caption-text\">Fig. 12 Interference diagram of the inclined plane on the tool<\/p><\/div>\n<div id=\"attachment_11142\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11142\" class=\"lazyload size-fusion-600 wp-image-11142\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-600x437.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-600x437.png\" alt=\"\" width=\"600\" height=\"437\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27437%27%20viewBox%3D%270%200%20600%20437%27%3E%3Crect%20width%3D%27600%27%20height%3D%27437%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-200x146.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-300x218.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-400x291.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-600x437.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-768x559.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part-800x582.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-13-Profile-of-the-X-and-Y-directions-of-the-surface-of-the-inclined-plane-for-the-tool-part.png 915w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11142\" class=\"wp-caption-text\">Fig. 13 Profile of the X and Y directions of the surface of the inclined plane for the tool part<\/p><\/div>\n<div id=\"attachment_11143\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11143\" class=\"lazyload size-fusion-600 wp-image-11143\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-600x370.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-600x370.png\" alt=\"\" width=\"600\" height=\"370\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27370%27%20viewBox%3D%270%200%20600%20370%27%3E%3Crect%20width%3D%27600%27%20height%3D%27370%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-200x123.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-300x185.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-400x247.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-600x370.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-768x473.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-800x493.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um-1024x631.png 1024w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-14-Surface-shape-PV-1.08um-RMS-0.207um.png 1040w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11143\" class=\"wp-caption-text\">Fig. 14 Surface shape (PV: 1.08um, RMS: 0.207um)<\/p><\/div>\n<div id=\"attachment_11144\" style=\"width: 610px\" class=\"wp-caption aligncenter\"><img decoding=\"async\" aria-describedby=\"caption-attachment-11144\" class=\"lazyload size-fusion-600 wp-image-11144\" src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-600x374.png\" data-orig-src=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-600x374.png\" alt=\"\" width=\"600\" height=\"374\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27374%27%20viewBox%3D%270%200%20600%20374%27%3E%3Crect%20width%3D%27600%27%20height%3D%27374%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-200x125.png 200w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-300x187.png 300w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-400x249.png 400w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-600x374.png 600w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-768x479.png 768w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-800x499.png 800w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface-1024x638.png 1024w, https:\/\/www.szlaser.com\/wp-content\/uploads\/2022\/11\/Fig.-15-Surface.png 1099w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-11144\" class=\"wp-caption-text\">Fig. 15 Surface\uff08PV\uff1a1.04um\uff0cRMS\uff1a0.183um\uff09<\/p><\/div><\/p>\n<\/div><div class=\"fusion-title title fusion-title-13 fusion-sep-none fusion-title-text fusion-title-size-four\"><h4 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:22;--minFontSize:22;line-height:1.34;\"><h4>3.2 Result analysis<\/h4><\/h4><\/div><div class=\"fusion-text fusion-text-12\"><p>The machining results show that the off-axis parabolic mirror is machined by the slow-tool servo turning method, and the precision of the machining surface shape can reach 1\/3\u03bb RMS by using the tool-setting trial cutting and the laser wavefront interferometer to fine-tune the tool centering position, has good process stability and economy, and meets the needs of our factory for this type of parts.<\/p>\n<\/div><div class=\"fusion-title title fusion-title-14 fusion-sep-none fusion-title-text fusion-title-size-three\"><h3 class=\"fusion-title-heading title-heading-left fusion-responsive-typography-calculated\" style=\"margin:0;--fontSize:24;line-height:1.3;\"><h3>4 Conclusions<\/h3><\/h3><\/div><div class=\"fusion-text fusion-text-13\"><p>For off-axis aspheric surfaces with large off-axis and moderate precision, using slow-tool servo turning method is an economical and reliable machining method. The offset surface shape accuracy of the diamond tool has a great influence. The cutting of the inclined plane can be used to test the tool setting accuracy. After adjustment, the surface shape accuracy of the workpiece can meet the general requirements. The off-axis paraboloid is a kind of free-form surface, but for the quadratic surface, the laser wavefront interferometer can still be used for relative measurement using the aberration-free point method.<\/p>\n<\/div><div style=\"text-align:right;\"><a class=\"fusion-button button-flat fusion-button-default-size button-default fusion-button-default button-1 fusion-button-default-span fusion-button-default-type\" target=\"_self\" href=\"https:\/\/www.szlaser.com\/index.php\/wiki\/off-axis-paraboloid-mirror\/\"><span class=\"fusion-button-text awb-button__text awb-button__text--default\">Manufacture of \u03a6420mm off-axis paraboloid mirror &gt;<\/span><\/a><\/div><\/div><\/div><\/div><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":7,"featured_media":0,"parent":8230,"menu_order":157,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-11130","page","type-page","status-publish","hentry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v18.7 (Yoast SEO v25.8) - 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